Improving the flatness of silicon backplanes for high quality FLCoS microdisplays-Reference-Cited by-同舟云学术

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Improving the flatness of silicon backplanes for high quality FLCoS microdisplays

Published:2002-06 Issue:3 Volume:23 Page:115-119
ISSN:0141-9382
Container-title:Displays
language:en
Short-container-title:Displays

Author:

Miremont C.,Bodammer G.,Calton D.,Parkes W.,Zheng W.,Underwood I.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Human-Computer Interaction

Reference17 articles.

1. Ferroelectric liquid crystal over silicon spatial light modulators—principles, practice and prospects;Underwood;O.S.A Trends in Optics and Photonics,1997

2. Die-sized displays enable new applications;Wright;Semiconductor International,1998

3. Microdisplay wafer-flatness metrology by optical interferometry;Walker;Journal of SID,2001

4. Thin Film Phenomena;Chopra,1969

5. Thermal stress and plastic deformation of thin silicon slices;Morizane;Journal of Applied Physics,1969

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Adding functionality to microchips by wafer post-processing;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;2007-06

2. Polarimetric characterization of liquid-crystal-on-silicon panels;Applied Optics;2006-03-10

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