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Rapid Thermal Annealing

Published:2001 Issue: Volume: Page:8009-8017
ISSN:
Container-title:Encyclopedia of Materials: Science and Technology
language:
Short-container-title:

Author:

Fiory A.T.

Publisher

Elsevier

Reference17 articles.

1. High power arc-lamp RTP system for high temperature annealing applications;Camm,1994

2. Microelectronics manufacturing science and technology: equipment and sensor technologies;Davis;Texas Instruments Tech. J,1992

3. Rapid Thermal Processing: Science and Technology,1993

4. The appearance of spatially nonuniform temperature distributions during rapid thermal processing;Kakoschke;Appl. Phys. A,1991

5. Rapid thermal processing of silicon;Kamgar,1989

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