A thin film polyimide based capacitive type relative humidity sensor-Reference-Cited by-同舟云学术

A thin film polyimide based capacitive type relative humidity sensor

Published:1993-05 Issue:1-3 Volume:13 Page:89-91
ISSN:0925-4005
Container-title:Sensors and Actuators B: Chemical
language:en
Short-container-title:Sensors and Actuators B: Chemical

Author:

Kuroiwa Takaaki,Hayashi Tomohito,Ito Akihiko,Matsuguchi Masanobu,Sadaoka Yoshihiko,Sakai Yoshiro

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference7 articles.

1. An IC compatible polymer humidity sensor;Glenn;Tech. Digest, 3rd Int. Conf. Solid-State Sensors and Actuators (Transducers '85), Philadelphia, PA, USA,7111985

2. A capacitive polymer humidity sensor using silicon substrate;Takai;Tech. Digest, 7th Sensor Symp., Tokyo, Japan,1988

3. The long-term reliability of a switched-capacitor relative humidity sensor system;Jaafar;Sensors Mater.,1991

4. A capacitive humidity sensor with very fast response time and very low hysteresis;Grange;Proc. 2nd Int. Meet. Chemcial Sensors, Bordeaux, France,1986

5. Capacitive-type humidity sensor using poly(methyl methacrylate);Matsuguchi;Tech. Digest, 9th Chemical Sensor Symp., Tokyo, Japan,1989

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