Integrated ultra-thin-film gas sensors-Reference-Cited by-同舟云学术

Integrated ultra-thin-film gas sensors

Published:1994-05 Issue:1 Volume:20 Page:55-62
ISSN:0925-4005
Container-title:Sensors and Actuators B: Chemical
language:en
Short-container-title:Sensors and Actuators B: Chemical

Author:

Johnson C.L.,Schwank J.W.,Wise K.d.

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference13 articles.

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4. Modified palladium metal-oxide-semiconductor structures with increased ammonia gas sensitivity;Winquist;Appl. Phys. Lett.,1983

5. MOS hydrogen sensors with ultrathin layers of palladium;Maclay;IEEE Trans. Electron Devices,1985

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