An integrated gas sensor on silicon substrate with sensitive SnOx layer-Reference-Cited by-同舟云学术

An integrated gas sensor on silicon substrate with sensitive SnOx layer

Published:1990-08 Issue:3 Volume:2 Page:233-236
ISSN:0925-4005
Container-title:Sensors and Actuators B: Chemical
language:en
Short-container-title:Sensors and Actuators B: Chemical

Author:

Stoev I.,Kohl D.

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference7 articles.

1. A. Grisel and V. Demarne, An integrated low power thin film CO gas sensor on Si, Proc. 2nd Int. Meeting Chemical Sensors, Bordeaux, France, July 7-10, 1986, p. 247

2. U. Dibbern and G. Kürsten, A miniaturized SnO2 gas sensor, Eurosensors '87, 1st European Conf. Sensors and their Applications, Cambridge, U.K., Sept. 22–24, 1987, p. 135

3. F. Nuscheler, A silicon gas sensor to detect combustible gases, Proc. 2nd. Int. Meet. Chemical Sensors, Bordeaux, France, July 7–10, 1986, p. 235

4. The tin oxide gas sensor and its applications;Watson;Sensors and Actuators,1984

5. Semiconductor gas sensors;Morrison;Sensors and Actuators,1982

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