Capacitive humidity sensor with controlled performances, based on porous Al2O3 thin film growm on SiO2-Si substrate-Reference-Cited by-同舟云学术

Capacitive humidity sensor with controlled performances, based on porous Al2O3 thin film growm on SiO2-Si substrate

Published:1994-04 Issue:1-3 Volume:19 Page:551-553
ISSN:0925-4005
Container-title:Sensors and Actuators B: Chemical
language:en
Short-container-title:Sensors and Actuators B: Chemical

Author:

Sberveglieri G.,Rinchetti G.,Groppelli S.,Faglia G.

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference6 articles.

1. Effects of water vapour on the electrical properties of anodized aluminium;Ansbacher;Nature (London),1953

2. Electrical properties of anodized aliminium in a humid atmosphere;Sadaoka;J. Mater. Sci.,1986

3. Humidity sensitive MIS structure;Westcott;J. Phys. E.,1985

4. Humidity sensitive MOS structure;Rogers;Proc. Int. Meet. Chemical Sensors, Fukuoka, Japan,1983

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