Fluxless wafer bonding with Sn-rich Sn–Au dual-layer structure
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference15 articles.
1. Wafer bonding technology and its applications in optoelectronic devices and materials
2. Wafer-to-wafer bonding for microstructure formation
3. Silicon‐On‐Insulator by Wafer Bonding: A Review
4. Low-temperature silicon wafer-to-wafer bonding using gold at eutectic temperature
5. Low-temperature intermediate Au-Si wafer bonding; eutectic or silicide bond
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