Thickness dependence of the electro-mechanical response of sputter-deposited Mo thin films on polyimide: Insights from in situ synchrotron diffraction tensile tests-Reference-Cited by-同舟云学术

Thickness dependence of the electro-mechanical response of sputter-deposited Mo thin films on polyimide: Insights from in situ synchrotron diffraction tensile tests

Published:2017-06 Issue: Volume:697 Page:17-23
ISSN:0921-5093
Container-title:Materials Science and Engineering: A
language:en
Short-container-title:Materials Science and Engineering: A

Author:

Jörg Tanja,Cordill Megan J.,Franz Robert,Kirchlechner Christoph,Többens Daniel M.,Winkler Jörg,Mitterer Christian

Funder

Österreichische Forschungsförderungsgesellschaft

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

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3. Morphological, electrical and optical properties of sputtered Mo thin films on flexible substrates;Bollero;Phys. Status Solidi A,2009

4. Diffusion barrier performances of thin Mo, Mo-N and Mo/Mo-N films between Cu and Si;Song;Thin Solid Films,2005

5. Investigation of thermal stability of Mo thin-films as the buffer layer and various Cu metallization as interconnection materials for thin film transistor–liquid crystal display applications;Yen;Thin Solid Films,2007

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