A sputtering ion source-Reference-Cited by-同舟云学术

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A sputtering ion source

Published:1965-01 Issue: Volume:38 Page:15-18
ISSN:0029-554X
Container-title:Nuclear Instruments and Methods
language:en
Short-container-title:Nuclear Instruments and Methods

Author:

Hill K.J.,Nelson R.S.

Publisher

Elsevier BV

Subject

General Medicine

Reference7 articles.

1. The interaction of radiation with solids;Thompson,1964

2. An investigation of thermal spikes by studying the high energy sputtering of metals at elevated temperatures

3. Electromagnetically Enriched Isotopes and Mass Spectrometry;Druaux,1956

4. A high temperature sputtering ion source for a laboratory isotope separator

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1. The physics and applications of ion beam erosion;Journal of Physics D: Applied Physics;2001-01-26

2. Angular distribution for the elastic scattering of electrons fromNa+ions;Physical Review A;1996-10-01

3. Experimental measurements of low-energy elastic scattering of electrons from ions;Journal of Physics B: Atomic, Molecular and Optical Physics;1996-08-28

4. An ion source for solid elements with mechanical sputtering;Vacuum;1996-02

5. A Compact Sheet Ion Source for Metal Ion Beam;Ion Implantation Technology–92;1993

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