Ion beam studies-Reference-Cited by-同舟云学术

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Ion beam studies

Published:1977-05 Issue:1 Volume:143 Page:99-115
ISSN:0029-554X
Container-title:Nuclear Instruments and Methods
language:en
Short-container-title:Nuclear Instruments and Methods

Author:

Freeman J.H.,Chivers D.J.,Gard G.A.

Publisher

Elsevier BV

Subject

General Medicine

Reference21 articles.

1. Proc. Int. Mass Spectrometry Conf.;Freeman,1969

2. also AERE, Harwell, Report R-6354.

3. Proc. Int. Conf. on Electromagnetic isotope separators;Freeman,1970

4. also AERE, Harwell, Report R-6497.

5. Proc. Symp. on Electron and ion beam science and technology;Aitken,1970

Cited by 31 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. The fabrication of advanced transistors with plasma doping;Surface and Coatings Technology;2002-07

2. Ion implantation for silicon device manufacturing: A vacuum perspective;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1996-05

3. Characterization of defects in Si and SiO2−Si using positrons;Journal of Applied Physics;1994-11

4. Review of secondary ion mass spectrometry characterization of contamination associated with ion implantation;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1994-07

5. Positron annihilation study of P implanted Si;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1993-04

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