A simple theory of single crystal sputtering-Reference-Cited by-同舟云学术

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A simple theory of single crystal sputtering

Published:1965-01 Issue: Volume:38 Page:263-268
ISSN:0029-554X
Container-title:Nuclear Instruments and Methods
language:en
Short-container-title:Nuclear Instruments and Methods

Author:

Lehmann Chr.

Publisher

Elsevier BV

Subject

General Medicine

Reference23 articles.

1. Sputtering Experiments with 1‐ to 5‐keV Ar+ Ions

2. Proc. 5th Conf. Ionization Phen. in Gases;Thompson,1961

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Recollections of fifty years with sputtering;Thin Solid Films;2012-07

2. Angular, energy, and mass distribution of sputtered particles;Topics in Applied Physics;1991

3. Sputtering yields of single crystalline targets;Topics in Applied Physics;1981

4. The ejection of atomic particles from ion bombarded solids;Advances in Physics;1970-07

5. Computer Simulation of Sputtering;Journal of Applied Physics;1968-07

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