Backscattering measurements of P+ implanted GaAs crystals
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Published:1980-03
Issue:1-3
Volume:170
Page:403-406
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ISSN:0029-554X
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Container-title:Nuclear Instruments and Methods
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language:en
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Short-container-title:Nuclear Instruments and Methods
Cited by
2 articles.
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1. Ion Implantation in Iii–V Semiconductors;Materials Processing: Theory and Practices;1989
2. Disorder dependence of ion implanted GaAs on the type of ion;Nuclear Instruments and Methods in Physics Research;1982-12