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Microsensors for heat transfer and fluid flow measurements

  • Published:1990-01 Issue:1 Volume:3 Page:52-59
  • ISSN:0894-1777
  • Container-title:Experimental Thermal and Fluid Science
  • language:en
  • Short-container-title:Experimental Thermal and Fluid Science

Author:

Udell Kent S.,Pisano Albert P.,Howe Rogel T.,Muller Richard S.,White Richard M.

Publisher

Elsevier BV

Subject

Fluid Flow and Transfer Processes,Mechanical Engineering,Aerospace Engineering,Nuclear Energy and Engineering,General Chemical Engineering

Reference30 articles.

1. Silicon as a Mechanical Material;Petersen,1982

2. Silicon Micromachining and Its Application to High Performance Integrated Sensors;Wise,1985

3. Polycrystalline Silicon Micromachining;Howe,1985

4. Fabrication Techniques for Integrated Sensor Microstructures;Guckel,1986

5. Fine Grained Polysilicon and Its Application to Planar Pressure Transducers;Guckel,1987

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