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10. Lithography

Published:1998 Issue: Volume: Page:205-223
ISSN:1079-4042
Container-title:Experimental Methods in the Physical Sciences
language:
Short-container-title:

Author:

Vladimirsky Yuli

Publisher

Elsevier

Reference31 articles.

1. “An Introduction to Lithography,”;Thompson,1994

2. “Manufacturing Process Technology for MOS VLSI,”;Voltmer,1981

3. “VLSI Device Fundamentals,”;Prince,1982

4. The National Technology Roadmap for Semiconductors,1997

5. “X-Ray Lithography,”;Cerrina,1997

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Advances, Application and Challenges of Lithography Techniques;2024 5th International Conference on Advancements in Computational Sciences (ICACS);2024-02-19

2. Microsystems Manufacturing Methods: Integrated Circuit Processing Steps;Process Variations in Microsystems Manufacturing;2020

3. Optically controlled coherent X-ray radiations from photo-excited nanotubes;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2017-09

4. Diffraction criterion for a slit under spherical illumination;Optics Communications;2007-06

5. Near field x-ray lithography simulations for printing fine bridges;Journal of Physics D: Applied Physics;2003-10-01

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