Environmentally friendly buff cleaning of ceria nanoparticles using bubbles in gas-dissolved water
Author:
Publisher
Elsevier BV
Subject
Colloid and Surface Chemistry
Reference50 articles.
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3. Effects of Gas-Dissolved Water for Ceria Nanoparticles on the SiO2 Film Surface in Post-CMP Cleaning;ECS Journal of Solid State Science and Technology;2024-05-01
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