Author:
Shi F.,Ramesh P.,Mukherjee S.
Subject
Computer Science Applications,Mechanical Engineering,General Materials Science,Modeling and Simulation,Civil and Structural Engineering
Reference33 articles.
1. Electrostatic actuators for micromechatronics;Fujita,1987
2. Capacitive sensors: when and how to use them;Puers;Sensors Actuators A,1993
3. Selective chemical vapor deposition of tungsten for microelectromechanical structures;MacDonald;Sensors Actuators,1989
4. Fabrication of high frequency two-dimensional nanoactuators for scanned probe devices;Yao;J. Microelectromech. Syst.,1992
5. SCREAM I: a single mask, single-crystal silicon process for microelectromechanical structures;Shaw,1993
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