Funder
Seventh Framework Program FP
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference14 articles.
1. High-density embedded deep trench capacitors in silicon with enhanced breakdown voltage;Johari;IEEE Trans. Compon. Packag. Technol.,2009
2. Improving module performance and reliability in power electronic applications by monolithic integration of RC-snubbers;Erlbacher,2012
3. Anisotropic etching of silicon;Bean;IEEE Trans. Electron Devices,1978
4. A novel capacitor technology based on porous silicon;Lehmann;Thin Solid Films,1996
5. High-value MOS capacitor arrays in ultradeep trenches in silicon;Roozeboom;Microelectron. Eng.,2000
Cited by
2 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献