Fabrication of color-toned micro/nanopattern surface by submerged photosynthesis method-Reference-Cited by-同舟云学术

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Fabrication of color-toned micro/nanopattern surface by submerged photosynthesis method

Published:2022-02 Issue: Volume:256 Page:111727
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Tsukamura Jumpei,Takahashi Yuki,Zhang Lihua,Jeem Melbert,Okamoto Kazumasa,Watanabe Seiichi

Funder

Japan Society for the Promotion of Science

Ministry of Education, Culture, Sports, Science and Technology

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference39 articles.

1. Low-cost laser printable photomask: one-step, photoresist-free, fully solution processed high-grade photolithography mask;Yun;Appl. Surf. Sci.,2017

2. Roll-type photolithography for continuous fabrication of narrow bus wires;Lee;J. Micromech. Microeng.,2016

3. High-quality ZnO nanowire arrays directly fabricated from photoresists;Cheng;ACS Nano,2009

4. Micropatterning of ZnO nanoarrays by forced hydrolysis of anhydrous zinc acetate;Hu;Langmuir,2008

5. Electron beam lithography: resolution limits and applications;Vieu;Appl. Surf. Sci.,2000

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