Analysis of pattern-dependent image placement of single-membrane stencil masks for electron-beam lithography-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Analysis of pattern-dependent image placement of single-membrane stencil masks for electron-beam lithography

Published:2007-05 Issue:5-8 Volume:84 Page:825-828
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Sano Hisatake,Kuwahara Naoko,Kitada Minoru,Yusa Satoshi,Fujita Horoshi,Takikawa Tadahiko,Hoga Morihisa

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference6 articles.

1. M. Kitada, S. Yusa, N. Kuwahara, H. Fujita, T. Takikawa, H. Sano, M. Hoga, in: Proceedings of the SPIE 5992 (2005) 59924R-1–12.

2. Data processing for LEEPL mask: splitting and placement correction

3. Structure and data processing for PEL mask compatible with image placement accuracy in the 65-nm node and beyond

4. Approach to full-chip simulation and correction of stencil mask distortion for proximity electron lithography

5. Stress and image-placement distortions of 200 mm low-energy electron projection lithography masks

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP