Fabrication of miniaturized Schottky emitter by wire electrical discharge machining (WEDM)-Reference-Cited by-同舟云学术

Fabrication of miniaturized Schottky emitter by wire electrical discharge machining (WEDM)

Published:2008-05 Issue:5-6 Volume:85 Page:1031-1034
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Dokania A.K.,Pelle M.,Kruit P.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference17 articles.

1. Multiple electron-beam lithography

2. Electron optical column for a multicolumn, multibeam direct-write electron beam lithography system

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5. Electron-beam microcolumns for lithography and related applications

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