Corner rounding of sharp silicon punching tool edges by local oxidation of silicon-Reference-Cited by-同舟云学术

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Corner rounding of sharp silicon punching tool edges by local oxidation of silicon

Published:2015-06 Issue: Volume:141 Page:178-183
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Mescheder Ulrich,Khazi Isman^ORCID

Funder

German Research Foundation (DFG)

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference15 articles.

1. Microforming

2. S. Hildering, L. Becsi, U. Engel, M. Merklein, U. Mescheder, in: Proc. 8th Int. Conf. Multi-Material Micro Manuf., pp. 191–195, 2011.

3. S. Hildering, U. Engel, M. Merklein, in: Proc. 14th Int. ESAFORM Conf. on Material Forming, pp. 481–486, 2011.

4. S. Hildering, M. Merklein, U. Engel, in: Proc. 4th Int. Conf. Nanomanufacturing nanoMan, 2014.

5. S. Hildering, U. Engel, M. Merklein, in: Proc. 10th Int. Conf. Multi-Material Micro Manufacture, Research Publ., S. 85–88, 2013.

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1. Oxidation Induced Stresses in High-Temperature Oxidation of Steel: A Multiphase Field Study;Metals;2020-06-16

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