Silicon nanowires by combined nanoimprint and angle deposition for gas sensing applications-Reference-Cited by-同舟云学术

Silicon nanowires by combined nanoimprint and angle deposition for gas sensing applications

Published:2011-08 Issue:8 Volume:88 Page:2100-2104
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Gao Chen,Xu Zhen-Cheng,Deng Shao-Ren,Wan Jing,Chen Yifang,Liu Ran,Huq Ejaz,Qu Xin-Ping

Funder

State Key Research Program

“985” Micro/Nanoelectronics Science and Technology Platform

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference11 articles.

1. ZnO nanowire field-effect transistor and oxygen sensing property

2. On-chip fabrication of SnO2-nanowire gas sensor: The effect of growth time on sensor performance

3. Surface Charge Sensitivity of Silicon Nanowires: Size Dependence

4. Top-down fabricated silicon nanowire sensors for real-time chemical detection

5. Silicon nanowire sensor for gas detection fabricated by nanoimprint on SU8/SiO2/PMMA trilayer

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