Low-cost polymeric microcantilever sensor with titanium as piezoresistive material-Reference-Cited by-同舟云学术

Low-cost polymeric microcantilever sensor with titanium as piezoresistive material

Published:2012-10 Issue: Volume:98 Page:338-342
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Shokuhfar A.,Heydari P.,Aliahmadi M.R.,Mohtashamifar M.,Ebrahimi-Nejad R. S.,Zahedinejad M.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference21 articles.

1. BioMEMS: state-of-the-art in detection, opportunities and prospects

2. Trace detection of peroxides using a microcantilever detector

3. Crystalline silicon cantilevers for piezoresistive detection of biomolecular forces

4. J. Thaysen, PhD Thesis, Department of Micro and Nanotechnology, Technical University of Denmark, Denmark, (2001).

5. Design optimization of piezoresistive cantilevers for force sensing in air and water

Cited by 12 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. From defect mode to topological metamaterials: A state-of-the-art review of phononic crystals & acoustic metamaterials for energy harvesting;Sensors and Actuators A: Physical;2024-01

2. Perforated auxetic honeycomb booster with reentrant chirality: A new design for high-efficiency piezoelectric energy harvesting;Mechanics of Advanced Materials and Structures;2023-11-19

3. Explosive boiling of argon on a copper surface coated with graphene/CNT/Cu nanowire; a molecular dynamics study;International Communications in Heat and Mass Transfer;2022-06

4. PDMS on ZnO Thin Film: A Mask for ZnO Thin Film in MEMS Fabrication;Emerging Trends in Nanotechnology;2021

5. Direct polymer microcantilever fabrication from free-standing dry film photoresists;Journal of Micromechanics and Microengineering;2020-06-30