Author:
Robogiannakis P.,Kyriakis-Bitzaros E.D.,Minoglou K.,Katsafouros S.,Kostopoulos A.,Konstantinidis G.,Halkias G.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Wafer-Level Heterogeneous Integration for MOEMS, MEMS, and NEMS;IEEE Journal of Selected Topics in Quantum Electronics;2011-05