Author:
Ryu JiHyeong,Lee Sang-Ho,Lim HyungJun,Park Hyun-Ha,Lee JaeJong
Funder
R&D program for Industrial Core Technology
Ministry of Knowledge Economy in Korea
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Cited by
4 articles.
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1. Filling angle and its effect on filling process in roll-to-roll ultraviolet imprint lithography;Journal of Micromechanics and Microengineering;2018-02-05
2. Effect of resin accumulation on filling process in roll-to-roll UV imprint lithography;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2017-05
3. Study on bubble defects in roll-to-roll UV imprinting process for micropyramid arrays II: Numerical study;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2016-09
4. Step-and-repeat nanoimprint on pre-spin coated film for the fabrication of integrated optical devices;Journal of Micro/Nanolithography, MEMS, and MOEMS;2015-08-07