Author:
Abbadie A.,Favier S.,Giroud C.,Billon T.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Cited by
2 articles.
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1. Wafer Reclaim;Handbook of Cleaning in Semiconductor Manufacturing;2011-02-22
2. Complete Removal of Copper Contaminants on Bare Silicon Surfaces by Use of HCN Aqueous Solutions;Journal of The Electrochemical Society;2008