Direct reproduction of 3D microstructures using a hybrid approach; by creation of master-patterns and metallic molds for embossing-Reference-Cited by-同舟云学术

Direct reproduction of 3D microstructures using a hybrid approach; by creation of master-patterns and metallic molds for embossing

Published:2011-11 Issue:11 Volume:88 Page:3300-3305
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Bae Kong Myeong,Ko Jong Soo,Lim Tae Woo,Yang Dong-Yol,Shin Bo Sung,Lee Hee Soo,Park Sang Hu

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference20 articles.

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2. Yong Son, Tae Woo Lim, Dong-Yol Yang, Prabhakaran Prem, Kwang-Sup Lee, The 6th ISNM, ASTIR Palace, Vouliagmeni, Athens (2008).

3. Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication

4. Fabrication of three-dimensional periodic microstructures by means of two-photon polymerization

5. Multiphoton-absorbing organic materials for microfabrication, emerging optical applications and non-destructive three-dimensional imaging

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