Fabrication of 120° silicon double mirrors robust against misalignment for use in micro optical gyroscopes-Reference-Cited by-同舟云学术

Fabrication of 120° silicon double mirrors robust against misalignment for use in micro optical gyroscopes

Published:2014-06 Issue: Volume:121 Page:72-75
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Niesel Thalke,Dietzel Andreas

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference5 articles.

1. T. Hashimoto, J. Maeya, T. Fujita, K. Maenaka: Concept of MEMS-RLG and Observation of a winking phenomenon, in: World Automation Congress, 2010.

2. Modern Inertial Technology: Navigation, Guidance, and Control;Lawrence,1993

3. A.W. Lawrence, Compound Resonator for Improving Optic Gyro Scale Factor, Patent No. 5,022,760, 1991.

4. Fabrication of 45° mirrors together with well-defined v-grooves using wet anisotropic etching of silicon

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Optical resonator formed with etched silicon micromirrors;Optical Engineering;2019-07-11

2. The effect of monohydric and polyhydric alcohols on silicon anisotropic etching in KOH solutions;Sensors and Actuators A: Physical;2017-10

3. Assembly of a micro-optical resonator based on silicon micro mirrors for use in gyroscopes;Current Developments in Lens Design and Optical Engineering XVIII;2017-08-23

4. Anisotropic etching of silicon in KOH + Triton X-100 for 45° micromirror applications;Microsystem Technologies;2016-08-30

5. Micro-clamps for precise positioning of 120° silicon double mirrors in a MOEMS gyroscope;Microelectronic Engineering;2016-06