Fabrication of conical micropore structure on silicon nitride/silicon using focused ion beam milling for biosensor application-Reference-Cited by-同舟云学术

Fabrication of conical micropore structure on silicon nitride/silicon using focused ion beam milling for biosensor application

Published:2015-02 Issue: Volume:133 Page:1-5
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Ariffin Nur Hamizah Zainal,Yahaya Hafizal,Shinano Shunji,Tanaka Satoru,Hashim Abdul Manaf

Funder

Kyushu University

Malaysia-Japan International Institute of Technology

Universiti Teknologi Malaysia

Malaysia Ministry of Education and Malaysia Ministry of Science, Technology and Innovation

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference31 articles.

1. Nanopore sensors for nucleic acid analysis

2. The potential and challenges of nanopore sequencing

3. Solid-state nanopore technologies for nanopore-based DNA analysis

4. DNA Profiling Using Solid-State Nanopores: Detection of DNA-Binding Molecules

5. Detection of Local Protein Structures along DNA Using Solid-State Nanopores

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