Fabrication of hollow microtip electrode array with variable diameter using self-aligned etching process-Reference-Cited by-同舟云学术

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Fabrication of hollow microtip electrode array with variable diameter using self-aligned etching process

Published:2019-08 Issue: Volume:216 Page:111100
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Nam Kyeong-Taek^ORCID,Lee Seung-Ki,Park Jae-Hyoung

Funder

Basic Science Research Program

National Research Foundation of Korea

Ministry of Science and ICT

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference18 articles.

1. Wide band gap materials for field emission devices;Zhirnov;J. Vac. Sci. Technol. A,1997

2. Fabrication and characterization of microtips for in situ scanning tunneling microscopy;Gewirth;J. Electronal. Chem.,1989

3. Trapping single molecules by dielectrophoresis;Holzel;Phys. Rev. Lett.,2005

4. Dielectrophoresis for manipulation of micro/nano particles in microfluidic systems;Zhang;Anal. Bioanal. Chem.,2010

5. Wireless instrumentation system based on dry electrodes for acquiring EEG signals;Dias;Med. Eng. Phys.,2012

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