Author:
Tsuchiya Junpei,Hiwasa Shin,Taniguchi Jun
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference22 articles.
1. Nanoimprint lithography;Chou;J. Vac. Sci. Technol., B: Microelectron. Nanometer Struct.–Process., Meas., Phenom.,1996
2. Mold-assisted nanolithography: a process for reliable patterns replication;Haisma;J. Vac. Sci. Technol., B: Microelectron. Nanometer Struct.–Process., Meas., Phenom.,1996
3. Adhesion force measurement between the stamp and the resin in ultraviolet nanoimprint lithography—an investigative approach;Perumal;Nanotechnology,2009
4. Removal of UV-cured resin using a hybrid cleaning process for nanoimprint lithography;Kim;Microelectron. Eng.,2014
5. High-resolution fused silica mold fabrication for UV-nanoimprint;Voisin;Microelectron. Eng.,2007
Cited by
10 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献