Investigation of a Ta–Si–O/Ta–Si–N bilayer system for embedded SAW finger structures

Author:

Reitz D.,Heuer H.,Baunack S.,Hübner R.,Hoffmann V.,Menzel S.,Wenzel C.,Wetzig K.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference10 articles.

1. Investigation of high power effects on Ti/Al and Ta-Si-N/Cu/Ta-Si-N electrodes for SAW devices

2. Patent Nr. DE 10206480 A1.

3. H. Heuer, C. Wenzel, D. Herrmann, R. Hübner, Z.L. Zhang, J.W. Bartha, accepted.

4. K. Nötzold, Diploma thesis, Zwickau University of Applied Sciences, 2004.

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4. Oberflächenwellen-Strukturen in Cu-Damaszentechnologie;Vakuum in Forschung und Praxis;2007-08

5. Damascene technique applied to surface acoustic wave devices;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2007

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