Fabrication and measurement of large-area sub-wavelength structures with broadband and wide-angle antireflection effect-Reference-Cited by-同舟云学术

Fabrication and measurement of large-area sub-wavelength structures with broadband and wide-angle antireflection effect

Published:2010-05 Issue:5-8 Volume:87 Page:1323-1327
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Chen Yung-Pin,Chiu Hsin-Chieh,Chen Guan-Yu,Chiang Chieh-Hsiu,Tseng Ching-Tung,Lee Chih-Hsien,Wang Lon A.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference18 articles.

1. Optimal design for antireflective tapered two-dimensional subwavelength grating structures

2. Tunable reflection minima of nanostructured antireflective surfaces

3. Broadband antireflection gratings fabricated upon silicon substrates

4. Fabrication of Microcone Array for Antireflection Structured Surface Using Metal Dotted Pattern

5. Antireflective subwavelength structures on crystalline Si fabricated using directly formed anodic porous alumina masks

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