Author:
Cianci E.,Coppa A.,Foglietti V.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference9 articles.
1. On the resonance frequencies of microbridges
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4. A. Savoia, G. Caliano, R. Carotenuto, C. Longo, P. Gatta, A. Caronti, E. Cianci, V. Foglietti, M. Pappalardo, in: Proceedings of IEEE Ultrasonics Symposium 2005, vol. 4, 2005, pp. 1960–1963.
5. Influence of Deposition Temperature, Gas Pressure, Gas Phase Composition, and RF Frequency on Composition and Mechanical Stress of Plasma Silicon Nitride Layers
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