Author:
Vereecke B.,Pantouvaki M.,Ciofi I.,Beyer G.P.,Tökei Zs.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference6 articles.
1. Low dielectric constant materials for microelectronics
2. Y. Travaly et al., in: IEEE Transactions on Semiconductor Manufacturing, vol. 20, No. 3, August 2007.
3. Hewlett Packard, Model 4284A Operation Manual, 2000.
4. D. De Roest et al., in: Advanced Metallization Conference, 13–15 October 2009, Baltimore, MD, USA.
5. G. Aksenov et al., MRS Symposium Proceedings 1156 (2009) D02-D08.
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