Author:
Koutsoureli M.,Stavrinidis G.,Birmpiliotis D.,Konstantinidis G.,Papaioannou G.
Funder
European Union and Greek national funds
Operational Program Competitiveness, Entrepreneurship and Innovation
RESEARCH – CREATE – INNOVATE
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference33 articles.
1. RF MEMS: Theory Design and Technology;Rebeiz,2003
2. Carbon nanotube based dielectric for enhanced RF MEMS reliability;Bordas;IEEE MTT-S Int. Microw. Symp. Dig.,2007
3. Electrical properties of nanostructured SiN films for MEMS capacitive switches;Koutsoureli;J. Micromech. Microeng.,2017
4. Electrical properties of SiNx films with embedded CNTs for MEMS capacitive switches;Koutsoureli;Microelectron. Reliab.,2017
5. Temperature accelerated discharging process in SiNx films with embedded CNTs for applications in MEMS switches;Birmpiliotis,2018
Cited by
5 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献