Author:
Miyoshi J.,Lima L.P.B.,Diniz J.A.,Cavarsan F.A.,Doi I.,Godoy Filho J.,Silva A.R.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Cited by
3 articles.
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1. Ga+ focused ion beam lithography as a viable alternative for multiple fin field effect transistor prototyping;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2016-11
2. Fabrication of p-type silicon nanowires for 3D FETs using focused ion beam;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2013-11
3. Junctionless Fabrication on SOI Wafers Using Focused Ion Beam Milling and Al Diffusion;ECS Transactions;2012-08-30