Author:
Sun T.,Borucki L.,Zhuang Y.,Philipossian A.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
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2. Chemical–Mechanical Planarization of Semiconductor Materials;Oliver,2004
3. Optical interferometry for surface measurements of CMP pads
4. Microelectronic Applications of Chemical Mechanical Planarization;Li,2008
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