Author:
Klukowska Anna,Kolander Anett,Bergmair Iris,Mühlberger Michael,Leichtfried Hannes,Reuther Freimut,Grützner Gabi,Schöftner Rainer
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference5 articles.
1. High resolution lithography with PDMS molds
2. Applications of hybrid organic–inorganic nanocomposites
3. A. Klukowska, M. Vogler, A. Kolander, F. Reuther, G. Gruetzner, M. Muehlberger, I. Bergmair, R. Schoeftner, in: Uwe F. Behringer (Ed.), SPIE Proceedings, 24th European Mask and Lithography Conference, vol. 6792, p. 67920J.
4. Improving stamps for 10 nm level wafer scale nanoimprint lithography
5. .
Cited by
32 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献