Corrigendum to “Polymer filling ratio with various pressure variation rates in nanoimprint lithography” [Microelectron. Eng. 131 (2015) 24–28]
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Published:2015-02
Issue:
Volume:134
Page:68
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ISSN:0167-9317
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Container-title:Microelectronic Engineering
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language:en
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Short-container-title:Microelectronic Engineering
Author:
Ryu JiHyeong,Lim HyungJun,Lee Sang-Ho,Lee JaeJong
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials