Focused ion beam sculpted membranes for nanoscience tooling-Reference-Cited by-同舟云学术

Focused ion beam sculpted membranes for nanoscience tooling

Published:2006-04 Issue:4-9 Volume:83 Page:1474-1477
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Biance A.-L.,Gierak J.,Bourhis É.,Madouri A.,Lafosse X.,Patriarche G.,Oukhaled G.,Ulysse C.,Galas J.-C.,Chen Y.,Auvray L.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference6 articles.

1. Ion-beam sculpting at nanometre length scales

2. Fabrication of solid-state nanopores with single-nanometre precision

3. Exploration of the ultimate patterning potential achievable with focused ion beams

4. Formation of a few nanometer wide holes in membranes with a dual beam focused ion beam system

5. Kistlaar et al., Micro Nano Eng. (2005).

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