Author:
Sim Sung-min,Lee Yeonsu,Jang Yun-Ho,Lee Yong-Seok,Kim Yong-Kweon,Llamas-Garro Ignacio,Kim Jung-Mu
Funder
North Atlantic Treaty Organization
Spanish Ministry of Economy and Competitiveness projects
National Research Foundation of Korea
Ministry of Education, Science and Technology
Generalitat de Catalunya
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference16 articles.
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3. MEMS and Si Micromachined circuits for high-frequency applications;Katehi;IEEE Trans. Microw. Theory Tech.,2002
4. A Study on Wafer-Level Packaged Single Crystalline Silicon Single-Pole Nine-Throw RF MEMS Switch”, Ph. D. Dissertation;Kim,2007
5. Low-voltage high-isolation DC-to-RF MEMS switch based on an S-shaped film actuator;Oberhammer;Trans. Electron Devices,2004
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