Vacuum, temperature, and time dependencies of field-emission current for RF-MEMS applications-Reference-Cited by-同舟云学术

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Vacuum, temperature, and time dependencies of field-emission current for RF-MEMS applications

Published:2007-05 Issue:5-8 Volume:84 Page:1345-1353
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Yamashita Kiyotaka,Sun Winston,Charlot Benoit,Kakushima Kuniyuki,Fujita Hiroyuki,Toshiyoshi Hiroshi

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference8 articles.

1. High-Q UHF micromechanical radial-contour mode disk resonators

2. Recent progress in field emitter array development for high performance applications

3. Vapor Hydrofluoric Acid Sacrificial Release Technique for Micro Electro Mechanical Systems Using Labware

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