Author:
Gerlich Lukas,Ohsiek Susanne,Klein Christoph,Geiß Mario,Friedemann Michael,Kücher Peter,Schmeißer Dieter
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference11 articles.
1. D. Edelstein, C.C. Uzoh, Jr., P. DeHaven, P. Buchwalter, A. Simon, E. Cooney, S. Malhotra, D. Klaus, H. Rathore, B. Aganvala, D. Nguyen, Proc. IEEE Int. Interconnect Tech. Conf. (2001) 9–11.
2. L.G. Feinstein, R. Huttemann, Thin Solid Films 16 (1973) 129–145.
3. Phase analysis of TaN/Ta barrier layers in sub-micrometer trench structures for Cu interconnects
4. Controlling Ta phase in Ta/TaN bilayer by surface pre-treatment on TaN
5. X-ray photoelectron spectroscopy: Progress and perspectives
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