Effect of tip length and normal and lateral contact stiffness on the flexural vibration responses of atomic force microscope cantilevers-Reference-Cited by-同舟云学术

Effect of tip length and normal and lateral contact stiffness on the flexural vibration responses of atomic force microscope cantilevers

Published:2004-01 Issue:1 Volume:71 Page:15-20
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Wu Tser-Son,Chang Win-Jin,Hsu Jung-Chang

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference16 articles.

1. Atomic Force Microscopy

2. Coatings Tribology: Properties, Techniques and Applications in Surface Engineering;Holmberg,1994

3. Handbook of Micro/Nanotribology;Bhushan,1999

4. Effects of AFM-based nanomachining process on aluminum surface

5. Scanning thermal imaging microscopy using composite cantilever probes

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