Linear and rotational thermal micro-stepper motors-Reference-Cited by-同舟云学术

Linear and rotational thermal micro-stepper motors

Published:2012-10 Issue: Volume:98 Page:497-501
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Khiat Ali,Spronck Jo W.,van Schieveen Jeroen,Milosavljevic Silvana,Wei Jia,Estevez Pablo,Sarro Pasqualina M.,Staufer Urs

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

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5. N. Bencheikh, A. Khiat, C. Prelle, F. Lamarque, Two Dimensional Electromagnetic Mini-device for Micropositioning, Actuators, Bremen, Germany, June 14–16, 2006.

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