Evidence for metastable defects in airgap interconnects-Reference-Cited by-同舟云学术

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Evidence for metastable defects in airgap interconnects

Published:2006-11 Issue:11-12 Volume:83 Page:2386-2390
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Guedj C.,Stich A.,Pamler W.,Gabric Z.,Mondon F.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference10 articles.

1. ITRS roadmap. Available from: .

2. V. Arnal, J. Torres, P. Gayet, M. Haond, C. Vérove, B. Descouts, P. Spinelli, in: Proceedings of the AMC 2001, Materials Research Society, 2001, p. 71.

3. J.P. Gueneau de Mussy, S. Carniello, G. P. Beyer, K. Maex, MAM 2004.

4. J. Noguchi, K. Sato, N. Konishi, S. Uno, T. Oshima, U. Tanaka, K. Ishikawa, H. Ashihara, T. Saito, M. Kubo, H. Aoki, T. Fujiwara, in: Proceedings of the IITC, 2004.

5. A. Stich, Z. Gabric, S. Penka, W. Pamler, G. Schindler, M. Engelhardt, M. Traving, in: Proceedings of the MAM 2006 Conference.

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