Author:
Taylor Hayden,Smistrup Kristian,Boning Duane
Funder
Singapore-MIT Alliance
Danish National Advanced Technology Foundation
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference5 articles.
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2. H. Taylor, D. Boning, “Fast simulation of pattern dependencies in thermal nanoimprint lithography,” Presented at Nanoimprint and Nanoprint Technology Conf., San Jose, CA, USA, November, 2009.
3. H.K. Taylor, D.S. Boning, “Toward Nanoimprint Lithography-Aware Layout Design Checking”, Proc. SPIE, vol. 7641, 764129, 2010.
4. Influence of a hard surface layer on the limit of elastic contact – Part I: Analysis using a real surface model;Nogi;Trans. ASME,1997
5. R.H. Pedersen, O. Hansen, A. Kristensen, A compact system for large-area thermal nanoimprint lithography using smart stamps, J. Micromech. Microeng. 18 (2008) 055018.
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