Failure Analysis Issues in Microelectromechanical Systems (MEMS)-Reference-Cited by-同舟云学术

Failure Analysis Issues in Microelectromechanical Systems (MEMS)

Published:2005-09 Issue:9-11 Volume:45 Page:1750-1757
ISSN:0026-2714
Container-title:Microelectronics Reliability
language:en
Short-container-title:Microelectronics Reliability

Author:

Walraven J.A.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Safety, Risk, Reliability and Quality,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference7 articles.

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5. Walraven JA, Waterson BA, De Wolf I. Failure analysis of Microelectromechanical Systems (MEMS). Micro electronics Desk Reference 5th Ed. Nov. 2004;193–218.

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