Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Safety, Risk, Reliability and Quality,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference47 articles.
1. Reliability methodology for prediction of micromachined accelerometer stiction;Hartzell;Proc. IEEE Int. Reliability Physics Symp.,1999
2. Design and performance of a microcantilever-based hydrogen sensor;Baselta;Sensors Actuators B,2003
3. Vibration and shock reliability of MEMS: modeling and experimental validation;Sundaram;Journal of Micromechanics and Microengineering,2011
4. Environment-induced failure modes of thin film resonators;Kazinczi,2002
5. Reliability of MEMS devices in shock and vibration overload situations;Kurth;Proc. of SPIE Vol.,2008
Cited by
6 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献